| 1 |
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Four Point Probe |
6" Wafer I-V Curve and Thin Film Surface Resistance Measurement |
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| 2 |
 |
Scanning Electron Microscope |
1. Observation of Surface Structure |
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| 3 |
 |
O2 Plasma Cleaner |
Cleaning Oil and Residue from Specimen Surfaces Using Plasma Principles |
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| 4 |
 |
X-Ray Diffraction metrology |
1. Polycrystalline Thin Film Diffraction and Characterization Analysi |
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| 5 |
 |
Cold Field Emission Scanning Electron Microscope |
1. Observation of Surface Structure (SEI, BEI)
2. EDS Elemental Analysis |
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| 6 |
 |
Cutting Machine |
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| 7 |
 |
Mounting Press Machine |
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| 8 |
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Grinding and Polishing Machine |
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| 9 |
 |
Measuring Microscope |
It combines an optical microscope with a precise, movable stage to perform target object measurements. The device uses an optical system similar to a projector, allowing for accurate, non-contact measurement, so there is no need to worry about damaging the target object. |
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| 10 |
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3D Digital Microscope |
This microscope features 3D functionality, capable of rapidly synthesizing high-definition depth of field (DOF), 3D shape correction functions (slope, sphere/cylinder), and general measurement functions. The equipment includes an ultra-compact high-performance zoom lens (VH-Z20R) and a high-resolution zoom lens (VH-Z500R). |
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